Abstract:The transparent ZnO thin films were prepared on Si(100) substrates by the sol-gel method. The structural and optical properties of ZnO thin films, submitted to an annealing treatment in the 400–700°C ranges are studied by X-ray diffraction (XRD) and UV-visible spectroscopic ellipsometry (SE). XRD measurements show that all the films are crystallized in the hexagonal wurtzite phase and present a random orientation. Three prominent peaks, corresponding to the (100) phase (2θ ≈ 31.8°), (002) phase (2θ ≈ 34.5°), and (110) phase (2θ ≈ 36.3°) appear on the diffractograms. The crystallite size increases with increasing annealing temperature. These modifications influence the optical properties. The optical constants and thickness of the films have been determined by analysing the SE spectra. The optical bandgap has been determined from the extinction coefficient. We found that the refractive index and the extinction coefficient increase with increasing annealing temperature. The optical bandgap energy decreases with increasing annealing temperature. These mean that the optical quality of ZnO films is improved by annealing.

Effect of Annealing Conditions on Properties of Sol-Gel Derived Al-Doped ZnO Thin Films

Effect of Annealing Temperature and Cooling Rate on the Properties of Sol-Gel Derived ZnO :Al Thin Films

Surface Topography and Optical Properties of Al-doped ZnO Thin Films by Sol-gel Process

Preparation and Characterization of Na-doped ZnO Thin Films by Sol–gel Method

Investigation of Annealing-Treatment on Structural and Optical Properties of Sol-Gel-Derived Zinc Oxide Thin Films

Effect of Annealing Treatment on the Structural, Optical, and Electrical Properties of Al-doped ZnO Thin Films

Effects of annealing temperature on the structural and optical properties of ZnO thin films prepared by sol-gel method

Effect of annealing on photoluminescence of ZnO:Al thin films prepared by sol-gel method

Effect of heat treatment on microstructure and transparent conducting properties of sol-gel ZnO/Al thin films

Effects of Annealing Temperature and Al Doping Concentration on the Optical Properties of ZnO Thin Films by Sol-Gel Technique

The effect of heating rate on the structural and electrical properties of sol-gel derived Al-doped ZnO films

Effects of Annealing on Properties of (Na,Mg):ZnO Thin Films Deposited by Sol-Gel Method

Effects of Aging Time and Annealing Temperature on Structural and Optical Properties of Sol-Gel ZnO Thin Films

Effect of annealing on the structural, topographical and optical properties of sol gel derived ZnO and AZO thin films

Effect of Annealing Atmosphere on the Electrical and Optical Properties of Sol–gel Derived Al Doped Zn1 − Xmgxo Thin Film

Influence of Annealing on Microstructure and Photoluminescence Properties of Al-Doped ZnO Films

Effect of Annealing on Photoluminescence of ZnO: Al Thin Films Prepared by Sol-Gel Method

Effects of Annealing Time on Properties of ZnO:Al Thin Films Formed by Sol-gel Technique

Influence of Thermal Treatment on the Crystal Structure and Optical and Electrical Properties of Al-doped ZnO Films

Effects of Annealing and Dopant Concentration on the Optical Characteristics of ZnO:Al Thin Films by Sol–gel Technique

Preparation of highly transparent conductive Al-doped ZnO thin films and annealing effects on properties