Hydrophilicity of Polyimide Surface-Modified by Plasma Bombardment

Jin Ma,Chenguo Wu,Peixuan Wu,Sanpo Wang,Jie Shen
DOI: https://doi.org/10.3969/j.issn.1672-7126.2009.06.14
2009-01-01
Abstract:A novel technique was developed to improve the hydrophilicity of polyimide surface and to enhance its interfacial adhesion to Cu film.In the technique,polyimide surfaces were modified by plasma bombardment.The impacts of the surface modification conditions,including type of plasma,bombardment current,time and pressure,on its hydrophilicity were sludied.In addition,the Cu films were deposited on the surface modified polyimide substrate.The results show that plasma surface modification significantly improves its hydrophilicity and its interfacial adhesion.Interesting finding is that the higher the hydrophilicity,the stronger the interfacial adhesion.We suggest that a judicious choiec of plasma surface modification conditions may lead to an optimized hydrophilicity.
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