Uniformity of thickness and surface properties of tin films deposited by vacuum arc

Yongqiang Wei,Chunzhi Gong,Xiubo Tian,Shiqin Yang

DOI: https://doi.org/10.3321/j.issn:1002-185x.2009.05.009

2009-01-01

Rare Metal Materials and Engineering

Abstract:During vacuum arc deposition processes, non-uniformity of thickness and surface properties of deposited films may be induced due to the line-of-sight of vacuum arc plasma. In this paper TiN films were deposited on AISI201 stainless steel horizontally located in front of the arc source and the uniformity of macroparticle, film thickness and surface properties is focused on. The phase structure, surface morphology and corrosion-resistance were analysized by XRD, SEM and electrochemical method. The frictional behavior of uncoated and coated stainless steel was evaluated by pin-on-disk tribometer. The scratch test and micro indentor were utilized to determine the adhesion and hardness of TiN films. The experimental results have demonstrated that TiN film deposited at center site possesses maximal hardness, highest corrosion-resistance and largest thickness. In contrast the TiN films at angle of 20 degrees display minimal thickness and hardness. There are more macroparticles on films deposited at positive angles leading to weak corrosion-resistance. This may be attributed to the force of gas flow induced by pumping system. The friction coefficient and adhesion of TiN films at central site are larger compared to those at other sites.