Abstract:Utilizing reactive DC magnetron sputtering method, TiN coatings were deposited on the silicon substrates at different nitrogen flows and powers. A study of the X-ray phase composition of the coatings was carried out. The stoichiometric composition of the coatings was determined using energy dispersive x-ray spectroscopy. The structure of the surface, cross-section, and thickness of the coatings were determined using scanning electron (SEM) and atomic force microscopy (AFM). A significant change in the surface structure of TiN coatings was established with changes in deposition power and nitrogen flow. SEM images of cross-sections of all coated samples showed that the formation of coatings occurs in the form of a columnar structure with a perpendicular orientation relative to the silicon substrate. The mechanical properties (elastic modulus E and microhardness H) of TiN coatings of the first group demonstrate a maximum at a nitrogen flow of 3 sccm and are 184 ± 11 GPa and 15.7 ± 1.3 GPa, respectively. In the second group, the values of E and H increase due to a decrease in the size of the structural elements of the coating (grains and crystallites). In the third group, E and H decrease. Microtribological tests were carried out in 4 stages: at a constant load, multi-cycle for 10 and 100 cycles, and with increasing load. The coefficient of friction (CoF) and specific volumetric wear ω depend on the roughness, topology, and mechanical properties of the resulting coatings. Fracture toughness was determined using nanoscratch and depends on the mechanical properties of TiN coatings. Within each group, coatings with the best mechanical and microtribological properties were described: in the first group-TiN coating at 3 sccm (with (29.6 ± 0.1) at.% N), in the second group-TiN coating at 2 sccm (with (40.8 ± 0.2) at.% N), and in the third group-TiN coating at 1 sccm (c (37.3 ± 0.2) at.% N).

Influence of Plasma Arc Current and Gas Flow on the Structural and Tribological Properties of TiN Coatings Obtained by Plasma Spraying

Two-Layer Nanocomposite TiC-Based Coatings Produced by a Combination of Pulsed Cathodic Arc Evaporation and Vacuum Electro-Spark Alloying

Improving the Efficiency of Air Plasma Spraying of Titanium Nitride Powder

Thermal-induced evolution of microstructure as a plasma arc coating Direction-Dependent phenomenon

Mechanical Properties Evaluation and Parametric Optimization of Atmospheric Plasma Spray NiTi Coating

The Influence of Nitrogen Flow on the Stoichiometric Composition, Structure, Mechanical, and Microtribological Properties of TiN Coatings

Effect of Nitrogen Protective Atmosphere on Microstructure and High Temperature Erosion Property of TiAl3 and Cr3C2 Composite Coatings

Microstructure and tribological properties of atmospheric plasma-sprayed TiO2 coatings reinforced by boron nitride nanosheets

Tribological Behavior of Atmospheric Plasma-Sprayed Cu-Ni Coatings

Effect of the Adhesive Properties of Vacuum Ion-Plasma TiAlN Coatings on Wear Resistance in Friction

Influence of the Nitrogen Flux Ratio on the Structural, Morphological and Tribological Properties of TiN Coatings

Investigation on the Performance of TiN Coatings by Reactive Plasma Spraying Crystallization

Effect of annealing treatment on the microstructure and current carrying tribological properties of in-situ formed TiO2−x coating prepared by plasma spraying

Plasma sprayed Titanium- Nanodiamond composite coatings with enhanced mechanical properties

INFLUENCE OF THE STRUCTURE OF IRON-TITANIUM THERMAL SPRAYED COATINGS ON THEIR WEAR RESISTANCE

Comparative Study of Tribological Behavior of TiN Hard Coatings Deposited by Various PVD Deposition Techniques

Microstructure, mechanical and high temperature tribological behaviour of graphene nanoplatelets reinforced plasma sprayed titanium nitride coating

Tribological properties and corrosion behavior of AC-HVAF sprayed nanostructured NiCrCoAlY-TiB2 coatings

Influence of nitridation on the microstructure and corrosion behavior of reactive plasma sprayed TiCN coatings

Microstructure and Mechanical Properties of Ti–Al–Ta–N Coatings Obtained by High-Power Impulse Magnetron Sputtering

Reactive nitrogen plasma spray coating of titanium nitride: plasma torch design and coating analysis