EXPERIMENTAL ANALYSIS ON EELECTRO- HYDRODYNAMIC MICROPUMP

He YU,Qiang ZHANG,Jian YU,Chong-Fang MA
DOI: https://doi.org/10.3321/j.issn:0253-231X.2009.05.038
2009-01-01
Kung Cheng Je Wu Li Hsueh Pao/Journal of Engineering Thermophysics
Abstract:A novel electronics cooling technology-electrohydrodynamic (EHD) micropump was fabricated. The EHD micropump was designed with an array of planar comb finger electrodes and driven by DC voltage, The testing result indicates that the pumping performance is proportional to the input voltage and inverse proportion to the channel height, the fluid with high permittivity and low viscosity will increase the pumping performance, and the cleanness degree of device will greatly influence EHD micropump ageing and effect.
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