Study on Preparation and Electrical Properties of Mo-doped Vanadium Oxide Thin Films by Organic Sol-Gel

Qianlin Zhang,Zhiming Wu,Yadong Jiang,Kang Zhao
DOI: https://doi.org/10.1117/12.837588
2009-01-01
Abstract:ABSTRACT An organic sol-gel method of preparing Mo-doped vanadium oxide thin films was described. Vanadium oxide powder and molybdenum trioxide powder were dissolved into a mixed solution of benzyl alcohol and isobutyl alcohol to obtain a vanadium solution, which was then spin-coated on glass substrates followed by an anneal at 500 . Square resistance was measured by the four-point probe, and film thickness was measured by the effects of molar ratio. The effects of doping concentration and film thickness on the electronic properties of vanadium oxide thin film, and film uniformity as well as stability are studied. Results show that the TCR (30 ) of VO 2 films was increased greatly, and the square resistance was reduced by Mo-doped. Keywords: Organic sol-gel , Mo-doped Vanadium oxide thin films , Electrical properties 1. INTRODUCTION In 1958, Bell Labs Morin found that the vanadium oxides have semiconductor - metal phase change characteristic [1] . In phase-change process, its structure changes from monoclinic into the four corners rutile structure
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