Abstract:Advanced materials and processing techniques are based largely on the generation and control of non-homogeneous microstructures, such as precipitates and grain boundaries. X-ray tomography can provide three-dimensional density and chemical distributions of such structures with submicrometre resolution1; structural methods exist that give submicrometre resolution in two dimensions2,3,4,5,6,7,8; and techniques are available for obtaining grain-centroid positions and grain-average strains in three dimensions7,9. But non-destructive point-to-point three-dimensional structural probes have not hitherto been available for investigations at the critical mesoscopic length scales (tenths to hundreds of micrometres). As a result, investigations of three-dimensional mesoscale phenomena—such as grain growth10,11, deformation12,13,14,15,16, crumpling17,18,19 and strain-gradient effects20—rely increasingly on computation and modelling without direct experimental input. Here we describe a three-dimensional X-ray microscopy technique that uses polychromatic synchrotron X-ray microbeams to probe local crystal structure, orientation and strain tensors with submicrometre spatial resolution. We demonstrate the utility of this approach with micrometre-resolution three-dimensional measurements of grain orientations and sizes in polycrystalline aluminium, and with micrometre depth-resolved measurements of elastic strain tensors in cylindrically bent silicon. This technique is applicable to single-crystal, polycrystalline, composite and functionally graded materials.

Three-Dimensional Imaging Of A Complex Concaved Cuboctahedron Copper Sulfide Crystal By X-Ray Nanotomography

High-Resolution Transmission Electron Microscopy Imaging Of Carbon Nanostructures

Imaging 3D Chemistry at 1 nm Resolution with Fused Multi-Modal Electron Tomography

Three-dimensional X-ray structural microscopy with submicrometre resolution

Electron Ptychographic Microscopy For Three-Dimensional Imaging

The Best of Both Worlds : 3 D X-ray Microscopy with Ultra-high Resolution and a Large Field of View

3D Nanocrystal Images at Atomic Resolution from Diffraction Data Using Iterative Algorithms

Nanoscale chemical imaging with structured X-ray illumination

Multimodal imaging of cubic Cu2O@Au nanocage formation via galvanic replacement using X-ray ptychography and nano diffraction

Electron tomography for functional nanomaterials

Three-dimensional Hard X-ray Ptychographic Reflectometry Imaging on Extended Mesoscopic Surface Structures

Quantitative Study of Interior Nanostructure in Hollow Zinc Oxide Particles on the Basis of Nondestructive X-Ray Nanotomography

Three-dimensional atomic-scale structure of size-selected nanoclusters on surfaces

Nanoscale Three-Dimensional Imaging of Integrated Circuits using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer

3-D TRANSMISSION ELECTRON MICROSCOPY RECONSTRUCTION OF A COMPLEX WO 3 GYROIDAL KIT-6 STRUCTURE

Transmission X-ray microscopy-based three-dimensional XANES imaging

Sub-nanometer depth resolution and single dopant visualization achieved by tilt-coupled multislice electron ptychography

Breaking the Crowther Limit: Combining Depth-Sectioning and Tilt Tomography for High-Resolution, Wide-Field 3D Reconstructions

Atomic electron tomography: 3D structures without crystals

Nanoparticle shape and configuration analysis by transmission electron tomography.

Three-Dimensional Orientation Mapping in the Transmission Electron Microscope