Thickness and Nb-Doping Effects on Ferro- and Piezoelectric Properties of Highly A-Axis-Oriented Nb-Doped Pb(Zr0.3ti0.7)O-3 Films

Zhi-Xiang Zhu,C. Ruangchalermwong,Jing-Feng Li
DOI: https://doi.org/10.1063/1.2975164
IF: 2.877
2008-01-01
Journal of Applied Physics
Abstract:Tetragonal Nb-doped Pb(Zr0.3Ti0.7)O3 (PNZT) films with a lead oxide seeding layer were deposited on the Pt(111)/Ti/SiO2/Si(100) substrates by sol-gel processing. The as-grown PNZT films with thicknesses ranging from about 0.08 to 0.78 μm show highly a-axis preferential orientation, and their ferroelectric and piezoelectric properties improved with increasing film thickness. Due to the combined effects of Nb doping and a-axis texturing as well as reduced substrate constraint, a high d33 constant up to 196 pm/V was obtained for PNZT film at 0.78 μm in addition to a large remnant polarization of 69 μC/cm2. This well a-axis-oriented PNZT films on platinized Si with a high piezoresponse are suitable for the fabrication of microelectromechanical devices.
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