Numerical simulation of interfacial delamination of PZT thin films by cohesive zone models

Yabin Yan,Fulin Shang
2008-01-01
Abstract:Previous experimental tests [Shang et al. Int. J Solids Strue. 42: 1729] show that the multilayered Cr/PZT/PLT/Pt/Ti thin films deposited on single crystal Si substrate delaminated along the interface between PZT and Cr layers in a brittle manner. This study starts from modeling based on cohesive zone concept, and numerical simulations are carried out to check the fracture behavior of this interfacial delamination. Two cohesive zone models (CZMs) of exponential type and bilinear type are adopted. The characteristic CZM parameters are extracted through calibration via the experimental results. The simulation results show that the critical stress for interfacial crack nucleation is apparently lower than yield tress of bulk PZT or Cr material and the fracture energy is low, comparing to typical film materials of several turn thicknesses. Our study demonstrated the applicability of CZM for characterizing the interface fracture behavior of mu m thick films.
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