Characteristics of Titanium-Doped Diamond-Like Carbon Films Deposited by Unbalanced Magnetron Sputtering

NIE Chao-yin,XIE Hong-mei,YANG Juan,CHEN Zhi-qian
2008-01-01
Abstract:Using unbalanced magnetron sputtering technique,hydrogen-free titanium-doped diamond-like carbon(Ti-DLC) films and hydrogen-free pure diamond-like carbon(DLC) film were deposited.Film morphology and microstructure were investigated by SEM,TEM and AFM.Microhardness,adhesion strength and friction coefficient of the films were investigated using nano indenter,scratch tester and ball-on-disc experiments.The results show that the hardness of Ti-DLC films decreases,and the adhesion strength increases drastically compared with pure DLC film.The hardness of the Ti-DLC films decreases to a stable value with increasing Ti content first and then increases when Ti content is above 25at%.This is due to the formation of nanocomposite structure of TiC nanocrystals dispersing in the amorphous DLC matrix.The friction coefficient of Ti-DLC films is lower than that of DLC film, and decreases with increasing Ti content,due to the fine and smoother surface of the Ti-DLC films.
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