Two-axis Micro Fluxgate Sensor

KANG Chun-lei,YANG Jian-zhong,TIAN Yang-chao,LIU Gang
DOI: https://doi.org/10.3969/j.issn.1007-4252.2008.02.009
2008-01-01
Abstract:A type of two-axis micro fluxgate sensor has been designed and fabricated.In order to measure X-and Y-axis weak magnetic fields at the same times,the magnetic core was designed to be square-ring shape which was twist with excitation and pick-up coils.The micro sensor was fabricated by MEMS technique,and 5μm thick Ni0.8Fe0.2(permalloy) film was micro-electroplated as magnetic core for the sensor.The size of the sensor is 7×7mm2 with the 50μm width coil.The result shows that the sensor can be used to measure weak magnetic field.Therefore,it will be useful in various application such as military,medical,and space research.
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