Resolution Model of Kirkpatrick-Baez Microscope with Single-Layer Films

Sheng-zhen YI,Bao-zhong MU,Xin WANG,Sheng-ling HUANG,Zhan-shan WANG
2008-01-01
Abstract:Based on influences of geometric aberration,diffraction,figure error and surface roughness,a root-mean-square spatial resolution model of Kirkpatrick-Baez(KB) microscope with single-layer film is proposed.An 8 keV X-ray imaging experiment by KB microscope with single Ir layer is performed,and the resolution is about 2 μm in central field and better than 5 μm in ±50 μm.The calculated results from the model is in good agreement with the experiment results,and using this model,the spatial resolution related to visual field can be estimated during the systems-design phase.
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