Kirkpatrick-Baez Microscope with Spherical Multilayer Mirrors Around 2.5kev Photon Energy

Ning An,Xuewei Du,Qiuping Wang,Zhurong Cao,Shaoen Jiang,Yongkun Ding
DOI: https://doi.org/10.1117/12.2060772
2014-01-01
Abstract:A Kirkpatrick-Baez (KB) x-ray microscope has been developed for the diagnostics of inertial confinement fusion (ICF). The KB microscope system works around 2.5keV with the magnification of 20. It consists of two spherical multilayer mirrors. The grazing angle is 3.575 degrees at 2.5keV. The influence of the slope error of optical components and the alignment errors is simulated by SHADOW software. The mechanical structure which can perform fine tuning is designed. Experiment result with Manson x-ray source shows that the spatial resolution of the system is about 3-4 mu m over a field of view of 200 mu m.
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