Investigation of the Connection Accuracy of the Sub-aperture Optical Testing with Experiment

Zhao-liang CAO,Wu-sheng HU,Quan-quan MU,Li-fa HU,Zeng-hui PENG,Yong-gang LIU,Li XUAN
2008-01-01
Abstract:The connection accuracy of the sub-aperture optical testing is investigated with the experiment. 9 sub-apertures are selected to reconstruct the whole surface and a ZYGO interferometer is used to measure the sub-aperture and the whole surface. The experimental results show that the time delay between measuring the whole surface and the standard sub-aperture affects the connection accuracy importantly. A method is given to eliminate the effect of the delay which is produced while measuring the standard sub-aperture and the whole surface. Then, we discuss the effect of the overlapping area on the connection accuracy with this method. The connection error of peak to valley (PV) and root mean square (rms) are 0.03λ (λ = 632.8 nm) and 0.01λ while the ratio of overlapping area to the sub-aperture area the overlap area is 7%. And the ratio is approximately linear to the connection accuracy.
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