Influence of oxygen plasma treatment on indium-tin-oxide films

Chen Liu,Guangxi Zhu,Deming Liu
DOI: https://doi.org/10.3321/j.issn:1671-4512.2007.07.012
2007-01-01
Abstract:From microcosimic point, the microcosmic morphology and electrical properties of indium-tin-oxide films was investigated with atomic force microscopy to explore the oxygen plasma treatment behaviour. The research results show that the average surface roughness of ITO film decreased from 4.6 nm to 2.5 nm and its conductance decreased greatly after oxygen plasma treatment, which originates from the decrease of oxygen vacancies caused by the further oxidization of indium-tin-oxide. These results explain why the oxygen plasma treatment can improve the performance of organic light-emitting diode.
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