Effects Of Interruption On Surface Morphology For Inas/Gaas Quantum Dots' Growth

Song Yuxin,Yu Zhongyuan,Liu Yumin
DOI: https://doi.org/10.1109/CLEOPR.2007.4391216
2007-01-01
Abstract:Kinetic Monte Carlo simulations are applied on the epitaxial growth of self-assembled InAs quantum dots on GaAs substrate with periodic strain-relief patterns. We demonstrate that uniformly sized and regularly ordered island arrays can be obtained by controlling interruption time at the first sub-monolayer stage.
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