An Effective Route for the Fabrication of Rare Earth-Iron-boron Thin Films Having Strong C-Axis Texture and Excellent Hard Magnetic Properties

S. L. Tang,M. R. J. Gibbs,H. A. Davies,Z. W. Liu,S. C. Lane,N. E. Mateen
DOI: https://doi.org/10.1063/1.2424539
IF: 2.877
2007-01-01
Journal of Applied Physics
Abstract:Rare-earth iron-boron (RE-Fe–B) thin films with a c-axis texture were prepared on a Ta (110) buffer layer on thermally oxidized Si substrates by dc magnetron sputtering. The microstructure, magnetic structure, and magnetic properties of these films were studied as a function of the deposition temperature. The results show that c-axis texture can be obtained over a wide range of deposition temperatures and that the degree of c-axis orientation improves with deposition temperature. It was established that deposition of a RE-Fe–B thin film to obtain grains with a strong c-axis RE2Fe14B texture, coexisting with an amorphous phase, followed by annealing at higher temperature, is an effective route for obtaining excellent hard magnetic properties. Initial results show that a film, which was deposited at 470°C and annealed at 590°C, had a high perpendicular coercivity of 1.8T, in combination with a large maximum energy product of 238kJ∕m3.
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