Fabrication of RE–Fe–B Films with Highly C-Axis Texture and Excellent Hard Magnetic Properties

S. L. Tang,M. R. J. Gibbs,H. A. Davies,Z. W. Liu,S. C. Lane,N. E. Mateen,Y. W. Du
DOI: https://doi.org/10.1063/1.2670195
IF: 2.877
2007-01-01
Journal of Applied Physics
Abstract:RE–Fe–B films were prepared on a Ta buffer layer on thermally oxidized Si substrates by dc magnetron sputtering. The structure, magnetic structure, and magnetic properties of RE–Fe–B films were studied. The results show the preparation procedure of deposition at 470°C to obtain a strong c-axis RE2Fe14B texture coexisting with an amorphous phase and following annealing at 590°C can effectively fabricate RE–Fe–B thin films with highly texture. The result shows that the film, which was deposited at 470°C and following annealing at 590°C, has a high perpendicular coercivity μ0Hci=1.8T and large magnetic energy product (BH)max=238kJ∕m3.
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