Research progress of microparticle control technology based on piezoceramics

Songmei Yuan,Chi Zhuang,Qiang Liu
DOI: https://doi.org/10.3321/j.issn:1002-185x.2007.z2.025
2007-01-01
Rare Metal Materials and Engineering
Abstract:The working principle of the microparticle control technology with the ultrasonic excited by the piezoelectric ceramics (PZT) is discussed. In medicine and biology fields, fluid control is a key technology. The existing structures are complex and difficult processed. For easy integration and industrialization, the technology of fluid transport with traveling wave actuated by piezoelectric ceramics and mechanism of actuating traveling wave and driving fluid are studied.
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