Piezoelectric flow control system based on microfluidic chip

Xiaoming Hu,Jingfang Li,Qin Li
DOI: https://doi.org/10.1109/ICMA.2012.6284353
2012-01-01
Abstract:We demonstrated an integrated piezoelectric flow control system combined with microfabrication technology and piezoelectric actuation. In this system, the microchip is made of PDMS using soft lithography and standard replica molding techniques. Incorporated with piezoelectric actuator, the device achieve the automatic flow control with low voltage varying from 10V to 30V at adjustable frequency ranging from 1 Hz to 1 kHz. © 2012 IEEE.
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