Abstract:Undesirable vibrations can greatly degrade the accuracy of phase shifting moiré interferometry. Although moiré interferometry is always equipped with a somehow elaborate system to dampen or to eliminate vibration, such as granite slab and air table, it is common to see the phase fluctuation of moiré diagram attributable to the various vibration during the measurement process. The sensitivity of moiré interferometry to vibration is rooted in the fundamental principles of the instrument. Typically, an imaging system collects interference patterns for a sequence of reference phases, and then a computer unwraps the original wave-front phase by analyzing the variations of intensity. Compared with classical interferometry, an experiment by grating rosette moiré interferometry with different principle of image formation is carried out and a corresponding efficient phase calculation method is developed to eliminate or compensate the effects of mechanical vibrations. In the decomposition and reconstitution of phase-shifting fringe patterns using discrete Fourier series, the phase-shifting fundamental coefficients ( a 0 , a 1 and b 1 ) are extracted from 10 samples in one phase shift cycle, with which three images with 120 degree intervals are obtained. Besides, a mathematical model for the phase error is derived by vibration frequency content or spectrum. Combined with traditional phase shifting algorithm, the proposed data post-processing technique can effectively reduce the phase ripple caused by vibrations. The result is supported by numerical simulations in MATLAB software and experiments with grating rosette moiré interferometry.

Research On Effects Of Phase Error In Phase-Shifting Interferometer

Phase Error Correction by &Lt;inline-Formula><math Display="inline" Overflow="scroll"><mi>π</mi></math></inline-Formula>-shift Odd-Step Fringe Projection and Speckle Filtering in Phase Measuring Profilometry

Measurement and Compensation of Phase-Shifting Deviation in Phase-Shifting Interferometry

Five-Frame Phase-Shifting Algorithm Based On The Immunity To Phase-Shifting Error

Computer-Generated Holographic Phase Shifter with Liquid Crystal Display

Efficient phase-shift error compensation algorithm based on probability density function

Effect of Random Phase Errors on Coherent Beam Combining Based on Liquid Crystal Phased Array

Characterizing Errors of Integrated Optical Phase-Shifting Interferometer by P2VM Method

Phase Error Compensation and Accuracy Analysis for Phase Measurement Profilometry

Effect of Phase Shifter's Sub-Processional Motion on Interferometry

Vibration Error-Compensation Technique in Phase Shifting Moiré Interferometry

Comparison and Correction of Errors Caused by Radial Phase-Shifting Nonuniformity of Test Optics in Multi-Step Phase-Shifting

Study on the Performance of Phase-Shifter in the MEMS Microscopic Interferometric Measuring System

A dual-stage correction approach for high-precision phase-shifter in Fizeau interferometers

Correction Of Errors Due To Uneven Intensity Distribution And Inaccurate Phase Shifts In Prism-Based Simultaneous Phase-Shifting Interferometry

Small Object Profilometry of LCD Digital Phase Shifting Projection Technology

Implementation of accurate phase shift in Fizeau interferometer

Analysis of phase calculation error introduced by the extinction ratio in instantaneous phase shifting interference

Phase Error Analysis and Reduction in Phase Measuring Deflectometry

The Design of Error Correction System of Laser Interferometer

A Phase Difference Measurement Method for Integrated Optical Interferometric Imagers