Study On Saw Characteristics Of Amorphous-Teo2/128 Degrees Y-X Linbo3 Structures

Shang Xiaoli,Gong Xun,Xiong Jun,Tong Tangji,Zhang De
DOI: https://doi.org/10.1109/ULTSYM.2007.476
2007-01-01
Abstract:Theoretical calculations have been performed for the temperature stability of the amorphous TeO2/128 degrees Y-X LiNbO3 structure. The phase velocity, electromechanical coupling coefficient and temperature coefficient of delay (TCD) have been calculated. Amorphous TeO2 film has been found as an attractive negative TCD over-layer that can yield a zero TCD when combined with a positive TCD material such as 128 degrees Y-X LiNbO3. And in comparison to conventional SiO2 over-layer, the amorphous TeO2 film reaches the zero TCD under a much less thickness. The effect of the temperature coefficients of amorphous TeO2'S elastic constants on the structure's TCD has also been studied. We find the temperature coefficients of amorphous TeO2'S C-11 have a more dominant effect on TCD.
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