Research and Fabrication of Integrated Bio-Sensor for Blood Analysis Based on Μtas

En De,Wei Jianxia,Tong Zhengrong,Chen Caihe,Cui Yuming,Xu Kexin,Si Qin,Li Chao,Jie Liu
DOI: https://doi.org/10.1117/12.725485
2007-01-01
Abstract:For simultaneously detecting multi-parameters of blood in the clinical diagnosis, the analysis apparatus should be smaller in size, more reliable and sensitive. So a kind of integrated bio-sensor for blood analysis based on Micro Total Analysis System (μTAS) is presented. It provides modern bio-sensor prospect with a novel technology. A multi-parameters of blood analysis integration sensor is μTAS bio-sensor based on 4 groups of interdigital array (IDA)microelectrodes. The IDA microelectrodes are fabricated on glass substrates by photography, film deposition and other microfabrication techniques. Thin-film gold microelectrode with a thickness of 250nm is deposited on a chromium-adhesion layer. The finger microelectrode width and space are both 10μm. The work space is 2×2cm2. The concentration of Blood sugar, Total Cholesterol, Acetone body and Lactic acid is measured by detecting steady-state limiting currents in IDA microelectrodes modified with enzymes on the "generate-collect" mode. Blood distribution structure is designed and fabricated, to distribute blood and isolate reaction areas. By contrasting two kinds of process flow based on lift-off and etching, etching is adopted to preparation method of microelectrode. A multi-channel apparatus for current measurement is accompleted. The system characteristics of the bio-sensor are tested. The curve of the apparatus time to current response is achieved by testing on real-time. The relationships between parameter concentration and current are analyzed in detail. The experimental data indicates: current measurement dimension 0~40μA, certainty of measurement 0.1μA, the performances of the bio-sensor meets design requirement.
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