A MEMS Sensor for Blood Glucose Monitoring Based on Tissue Fluid Ultrafiltration Sampling

Liu Yaxin,Yao Yufeng,Huang Bo,Zhong Ming

DOI: https://doi.org/10.13494/j.npe.2013.036

2013-01-01

Nanotechnology and Precision Engineering

Abstract:Considering the demand of long-term blood glucose monitoring,a novel MEMS sensor system was developed,which extracts tissue fluid in vivo by ultrafiltration and monitors glucose in vitro.The construction and properties of this sensor system for tissue fluid ultrafiltration sampling and on-line glucose monitoring were presented.It comprised a glucose sensor chip integrated on the microfluidics base.The microfluidics base consisted of PDMS microchannel and SU-8 check valve fabricated by MEMS technology.This sensor system could harvest tissue fluid under negative pressure for glucose monitoring and discharge the used tissue fluid after each measurement.The 3-electrode glucose sensor chip based on electrochemical mechanism was fabricated by silicon processing method,and it had a silicon etched cavity on the top side.Pores were etched into the membrane at the cavity ground,so the sensor chip was provided with diffusion control of the analyte through the membrane into cavity containing agarose immobilised enzyme.Experimental results show that this system can realize the flexible tissue fluid sampling,and its signal response time at increasing glucose concentrations is 5 s;under the voltage of 0.4 V the linear range is large enough to cover the required broad area of blood glucose(0.2—20 mmol / L),the sensitivity is 9.76 nA/(mmol·L-1),and the correlation coefficient is 0.995 4;the coefficient of variation for measuring 5 mmol/L glucose solution is 3.48%.It can be seen that the glucose sensor chip has good reliability and stability,and it can be easily integrated into the sensor system for tissue fluid sampling and subsequent glucose monitoring because of its small dimension.