Gas Damping of an Electrostatically Levitated Micro-Silicon Gyroscope

WU Liming,DONG Jingxin,HAN Fengtian,LIU Yunfeng
DOI: https://doi.org/10.3321/j.issn:1000-0054.2007.11.011
2007-01-01
Abstract:A six-DOF gas damping model was developed for an electrostatically levitated micro gyroscope using fluid mechanics and molecular dynamics models to obtain the dynamic characteristics for various working conditions.A linearized Reynolds equation was used to describe the squeeze film damping with a Couette model to describe the slide film damping with the gas flow,temperature variations and compressibility.The interior chamber gas film was subdivided into eight ring-shaped zones with translational damping coefficients at large magnitudes,radial vibration damping coefficients at small angles,and axial rotation damping coefficients for the rotator.Simulations show that the z-axis squeeze film damping has a dominant effect on the gyroscope levitation,with gas damping coefficients proportional to the second power of the gas film thickness and linearly related to the gas temperatures.
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