Abstract:The micro-electro-mechanical system (MEMS) resonator developed based on surface processing technology usually changes the section shape either due to excessive etching or insufficient etching. In this paper, a section parameter is proposed to describe the microbeam changes in the upper and lower sections. The effect of section change on the mechanical properties is studied analytically and verified through numerical and finite element solutions. A doubly-clamped microbeam-based resonator, which is actuated by an electrode on one side, is investigated. The higher-order model is derived without neglecting the effects of neutral plane stretching and electrostatic nonlinearity. Further, the Galerkin method and Newton⁻Cotes method are used to reduce the complexity and order of the derived model. First of all, the influence of microbeam shape and gap variation on the static pull-in are studied. Then, the dynamic analysis of the system is investigated. The method of multiple scales (MMS) is applied to determine the response of the system for small amplitude vibrations. The relationship between the microbeam shape and the frequency response is discussed. Results show that the change of section and gap distance can make the vibration soften, harden, and so on. Furthermore, when the amplitude of vibration is large, the frequency response softening effect is weakened by the MMS. If the nonlinearity shows hardening-type behavior at the beginning, with the increase of the amplitude, the frequency response will shift from hardening to softening behavior. The large amplitude in-well motions are studied to investigate the transitions between hardening and softening behaviors. Finally, the finite element analysis using COMSOL software (COMSOL Inc., Stockholm, Sweden) is carried out to verify the theoretical results, and the two results are very close to each other in the stable region.

Modeling of nano-resonator testing system by lumped parameter method

Study on Nonlinear Acoustic Waves in Stepped Acoustic Resonators

Tuning the Resonance Properties of 2D Carbon Nanotube Networks Towards a Mechanical Resonator

Beat Phenomena in Metal Nanowires, and Their Implications for Resonance-Based Elastic Property Measurements.

Electromagnetic analysis of thin film bulk acoustic resonator

Suspended Gate Field Effect Transistor Type Microelectromechanical Systems Resonators Modelling with Micro-Raman Spectroscopy Measured Residual Stress

Mechanical Behaviors Research and the Structural Design of a Bipolar Electrostatic Actuation Microbeam Resonator

Simultaneous determination of Young's modulus and residual stress via dynamic analysis of nanobridge exhibiting beam-to-string behaviors using a genetic algorithm

Double-beam modeling and experiments of resonance behaviors of AFM-based nanowires

Modeling and experimental testing of a composite bridge type amplifier based nano-positioner

Static and Dynamic Mechanical Behaviors of Electrostatic MEMS Resonator with Surface Processing Error

Dynamic modelling and quality factor evaluation of hemispherical shell resonators

Methods for Nonlinearities Reduction in Micromechanical Beams Resonators

Effects of Residual Stress on Static and Dynamic Characteristics of an Electrostatically Actuated Nanobeam

In-plane bending vibration of L-shaped cantilever nanobeams carrying a tip nanoparticle by nonlocal elasticity

Amplitude Deflection in a Nonlinear MEMS Resonator under Parametric Excitation

Theoretical modeling and experimental investigation of in-phase resonant MEMS mirrors with cascaded structures

Axisymmetric membrane nano-resonators: A comparison of nonlinear reduced-order models

Microelectromechanical System Resonant Devices: A Guide for Design, Modeling and Testing

Experimental Study on Dynamic Characteristics of Linear Parametrically Excited System

Structural Design and Testing of a Micromechanical Resonant Accelerometer