Effects of Residual Stress on Static and Dynamic Characteristics of an Electrostatically Actuated Nanobeam

A. Bhushan,M. M. Inamdar,D. N. Pawaskar

DOI: https://doi.org/10.48550/arXiv.1104.4602

2011-04-24

Abstract:Electrostatically actuated nanotubes and nanowires have many promising applications as nano-switches, ultra sensitive sensors and signal processing elements. These devices can be modelled as slender beams with circular cross-section. In this paper, effects of residual stress on static and dynamic characteristics of a cylindrical nanobeam are presented. Galerkin based multi-modal reduced order model technique has been used to solve the governing differential equation. The equation has also been solved numerically by collocation method for verification of the results. The effects of higher modes in reduced order modelling have been investigated. The analysis shows that the residual stress significantly influence the static and dynamic characteristics of the nanobeam. In particular, the results show that resonating frequency tunability increases significantly under the presence of compressive residual stress. In addition, an inherent resonating frequency stability mechanism under temperature variation in nanobeam resonators has also been explored.

Mesoscale and Nanoscale Physics

What problem does this paper attempt to address?

This paper aims to solve the problems of static and dynamic characteristics of electro - statically actuated nano - beams under the influence of residual stress. Specifically, the author studied the influence of residual stress (especially axial tensile and compressive residual stress) on the static deflection, pull - in parameters and resonance frequency of nano - beams. The following are the specific problems that this paper attempts to solve:

1. **Static characteristic analysis**:
- Research the static deflection of nano - beams under the applied DC voltage \( V_{DC} \).
- Analyze the influence of different axial loads \( N \) on the pull - in voltage and pull - in displacement.

2. **Dynamic characteristic analysis**:
- Explore the influence of residual stress on the tunability of the resonance frequency of nano - beams.
- Research the change of the first resonance frequency \( \omega_1 \) under the action of different DC voltages \( V_{DC} \).

3. **Temperature stability mechanism**:
- Explore the mechanism of the natural resonance frequency stability of nano - beam resonators under temperature changes.
- Research the influence of internal stress (similar to residual stress) on the resonance frequency and explore how to reduce this sensitivity under a specific DC voltage.

Through these studies, the author hopes to reveal the influence of residual stress and bias voltage on the performance of nano - beam resonators and propose a method to improve the tunability of resonance frequency and temperature stability by using these factors.

### Formula display

The main formulas involved in the paper include:

- The equation of motion of nano - beams:
\[
\hat{E}\hat{I} \frac{\partial^4 \hat{u}}{\partial \hat{x}^4} + \hat{\rho}\hat{A} \frac{\partial^2 \hat{u}}{\partial \hat{t}^2} + \hat{c} \frac{\partial \hat{u}}{\partial \hat{t}} = \left[ \frac{\hat{E}\hat{A}}{2\hat{L}} \int_0^{\hat{L}} \left( \frac{\partial \hat{u}}{\partial \hat{x}} \right)^2 d\hat{x} + \hat{N} \right] \frac{\partial^2 \hat{u}}{\partial \hat{x}^2} + \frac{\pi \varepsilon_0 (V_{DC} + V_{AC} \cos(\hat{\omega}_f \hat{t}))^2}{\sqrt{(\hat{g} + \hat{R} - \hat{u})^2 - \hat{R}^2} \left[ \cosh^{-1} \left( \frac{\hat{g} + \hat{R} - \hat{u}}{\hat{R}} \right) \right]^2}
\]

- The characteristic equation in the nonlinear vibration model:
\[
\phi_d'''' - \left( \alpha_1 \int_0^1 u_s'^2 dx + N \right) \phi_d'' - \left( 2\alpha_1 \int_0^1 u_s' \phi_d' dx \right) u_s'' - \alpha_2 V_{DC}^2 f'(u_s) \phi_d - \omega_d^2 \phi_d = 0
\]

where \( f(u) = \frac{1}{\sqrt{(1 + R_0 - u)^2 - R_0^2}} \left[ \cosh^{-1} \left( \frac{1 + R_0 - u}{R_0} \right) \right]^2 \), \( c = \frac{\hat{c} \hat{L}^4}{\hat{E} \hat{I} \hat{T}} \)