Abstract:Deformation measurement at macro/microscale can be fulfilled by a variety of methods with the development of experimental measuring techniques. However, the measurement of free-standing thin films is still difficult, especially for full-field measurement. The difficulty is the fabrication of the deformation markers (such as gratings or speckles) on the free-standing thin films. A grating fabrication technique based on focused ion beam (FIB) deposition is introduced in our previous works, and the superiority of this technique is minimal damage to the surface of the specimen. We adopted this FIB deposition technique to fabricate a frequency of 2000 line/mm gratings on the free-standing metallic films with a thickness of 2 mu m. Notches of 10 mu m length and 2 mu m width are prepared by the FIB etching at the edge of the films. An in situ tensile test is operated in the scanning electronic microscope system. At the crack initiation stage, the displacement field is measured from the deformation of the gratings. The fracture parameter J integral is characterized for the 2-mu m metallic films. The results demonstrate that the full-field measurement of the free-standing thin films at microscale can be realized successfully by this method. (C) 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)

Measurement of full-field large deformations at micro-scale

Large-deformation analysis in microscopic area using micro-moiré methods with a focused ion beam milling grating

Micro-deformation measurement using focused ion beam moiré method

Strain Analysis on Porous TiNi SMA Using SEM Moiré Method

Fabrication of high-frequency moiré gratings for microscopic deformation measurement using focused ion beam milling

Fabrication Technique of Deformation Carriers (gratings and Speckle Patterns) with Fib for Microscale/Nanoscale Deformation Measurement

Methodology for microscale deformation measurement of free-standing thin films

Development of the Technique for Fabricating Submicron Moiré Gratings on Metal Materials Using Focused Ion Beam Milling

The Technique for Fabricating Submicron Moiré Grating Using FIB Milling

Focused Ion Beam Moiré Method

High-Frequency Deformation Grating Fabrication Techniques and Applications

Deformation analysis in microstructures and micro-devices

Micro/Nano Grating and Its Application to Moire Measurement

Micro-moiré methods with high resolution microscopes and their applications

A Novel Method to Fabricate Micro-Gratings Applied for Deformation Measurement Around A Crack in A Thin Film

FIB Moiré Gratings and Their Application in the Measurement of Optical Fibers' Mechanical Properties

Nano-Grating Fabrication Technique

Phase Shifting Focused Ion Beam Moiré Method

Afm Scanning Moire Method For Nano-Deformation Measurement

Deformation Analysis of Shape Memory Alloy Using SEM Scanning Moiré Method

Experimental study on nanometer moire method