Disruption of self-organized striated structure induced by secondary electron emission in capacitive oxygen discharges
Li Wang,De-Qi Wen,Quan-Zhi Zhang,Yuan-Hong Song,Yu-Ru Zhang,You-Nian Wang
DOI: https://doi.org/10.1088/1361-6595/ab17ae
2019-05-13
Plasma Sources Science and Technology
Abstract:Self-organized striated structure has been observed experimentally and numerically in CF 4 plasmasin radio-frequency capacitively coupled plasmas recently (Liu et al 2016 Phys. Rev. Lett. 116255002). In this work, the striated structure is investigated in a capacitively coupled oxygendischarge with the introduction of the effect from the secondary electron emission, based on aparticle-in-cell/Monte Carlo collision model. As we know, the transport of positive and negativeions plays a key role in the formation of striations in electronegative gases, for which, theelectronegativity needs to be large enough. As the secondary electron emission increases, electronsin the sheaths gradually contribute more ionization to the discharge. Meanwhile, the increase of theelectron density, especially in the plasma bulk, leads to an increased electrical conductivity and areduced bulk electric field, which would shield the ions' mobility. These changes resu...
physics, fluids & plasmas