Far-Field Diffraction Pattern Analysis of Tiled Gratings

MA Yan-qin,DU Jing-lei,CHEN Ming-yong
IF: 0.6
2007-01-01
ACTA PHOTONICA SINICA
Abstract:Many optic engineerings such as ICF (Inertial Confinement Fusion) urgently need large-area grating.In the paper,based on the scalar diffraction theory,the intensity distribution of far-field diffraction of tiling grating is obtained and the effects of several tiling errors on grating performance are analyzed according to the possible alignment errors in the tiling progress.The calculated results indicate that the maximum intensity of far-field diffraction presents period variation with the longitudinal and transverse translation errors which can be compensated with each other,and the influence of rotating error on the diffraction filed is relatively severe.The maximum intensity will decrease to 0.9 and the separation angle between the directions of the principle maximums of two gratings is 9.587 5×10-5degree when rotating error is 9.587 5×10-5degree.The results will be helpful for evaluating and controlling the rotating errors.
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