Abstract:Nanomanipulation based on atomic force microscope is one of the key technologies for nanomanufacturing. It plays important role in practical fabrication of nanodevices. In this paper, nanomanipulation method is used to build a structure in nanometer scale. A basic pattern made up of single-wall carbon nanotube on silicon substrate was successfully obtained by sophisticated manipulations, and thus provides an effective way to make more complicated nanostructures. In the meantime, experiments results also show a promising prospect to build future nanodevices step by step using this technique. Carbon nanotubes are selected as the raw materials for nanofabrication due to their excellent mechanical and electrical properties, which are the most suitable for the application in building nano-electromechanical systems (NEMS). In addition, the major failure modes of nanomanipulation experiments were also analyzed by FED-SEM observation. The main factors affecting the final manipulation results, wear and pollution of tips, and their corresponding relations between tips and experiment results were analyzed. Furthermore, the preventive measurements were proposed in order to get better results. A new method for measuring manipulating forces was explored in the experiments based on a commercial AFM (Atom Force Microscope). Lateral forces while manipulating and cutting a single-walled carbon nanotube was successfully measured that providing valuable information for quantitative research on nanomechanics.

Precise Assembly and Electrical Contact of MWCNT Based on AC Dielectrophoresis and Robotic Nanomanipulation Technology

Electro-mechanically Controlled Assembly of Reconfigurable 3D Mesostructures and Electronic Devices Based on Dielectric Elastomer Platforms.

Assembling Carbon Nanotubes Based on DEP and Fluid Driving

A combination of capillary assembly and dielectrophoresis for wafer scale integration of carbon nanotubes-based electrical and mechanical devices

Tunable Assembly of Superfine Single-Walled Carbon Nanotube Fibers

Dielectrophoretic assembly of carbon-based nanomaterials

Dielectrophoretic Assembly of Carbon Nanotube Chains in Aqueous Solution

Large-scale directed assembly of single-walled carbon nanotube devices by alternating current coupling dielectrophoresis

Combining Fluidic Alignment with Dielectrophoresis to Assemble Carbon Nanotubes

Nanoelectromechanical Switches with Vertically Aligned Carbon Nanotubes

The effect of electrode physical design parameters on the assembly of single-walled carbon nanotubes by AC dielectrophoresis.

A Nanoscale Technique Of The Assembly Approach For Inas Nanowire Nano Device

Investigating Interfacial Contact Configuration and Behavior of Single-Walled Carbon Nanotube-Based Nanodevice with Atomistic Simulations

Integrating Vertically Aligned Carbon Nanotubes on Micromechanical Structures

The Influence of Experimental Parameters on the Assembly of SWNTs by AC Dielectrophoresis

Pinning of Single-Walled Carbon Nanotubes by Selective Electrodeposition

Establishing Ohmic Contact of a Radial Compressed CNT Bundle with High Work Function Metal

Vertical Assembly of Carbon Nanotubes for Vlsi Via Interconnection

Manufacturing Structures in Nanometer Scale by Nanomanipulation

Soft-lock drawing of super-aligned carbon nanotube bundles for nanometre electrical contacts

Orientation Experiment Of Mwcnts And Nanostructure Assembly