Abstract:Accurate and non-destructive technology for detection of subsurface defect has become a key requirement with the emergence of various ultra-precision machining technologies and the application of ultra-precision components. The combination of acoustic technique for sub-surface detection and atomic force microscopy (AFM) for measurement with high resolution is a potential method for studying the subsurface structure of workpiece. For this purpose, contact-resonance AFM (CR-AFM) is a typical technique. In this paper, a CR-AFM system with a different principle from commercially available instruments is set up and used for the detection of sub-surface Si samples with grating structures and covered by different thickness of highly oriented pyrolytic graphite (HOPG). The influence of subsurface burial depth on the detection capability is studied by simulations and experiments. The thickest HOPG film allowing for sub-surface measurement by the proposed method is verified to be about 30 μm, which is much larger than the feature size of the subsurface microstructure. The manuscript introduces the difference between this subsurface topography measurement principle and the commercially available AFM measurement principle, and analyzes its advantages and disadvantages. The experimental results demonstrates that the technique has the capability to reveal sub-surface microstructures with relatively large buried depth and is potential for engineering application in ultra-precision technologies.

Study On Space Morphology Of Molecular Structure By Afm

Study on space morphology of micromolecule structure of some biologic samples by AFM

Molecular Dynamics Simulation of Form Measurement Process of Soft Materials Using Atomic Force Microscope

Study of the Raman-Afm System for Simultaneous Measurements of Raman Spectrum and Micro/Nano-Structures

Application of Atomic Force Microscopy in Understanding Crystallization Process

Measurement of Sub-Surface Microstructures Based on a Developed Ultrasonic Atomic Force Microscopy

Chapter 5 Structural Biology with Cryo-AFMs and Computational Modeling

Afm Scanning Moire Method For Nano-Deformation Measurement

Study on a novel atomic force microscope for the detection of large-size samples

Multi Scan Mode Atomic Force Microscope with Improved Properties and High Applicability

Studies on Magnetic Nanomaterials by Atomic Force Microscopy with High Resolution

T0301-2-5 Modifying the Structure of Microwave AFM Probe for Improving the Sensitivity in the Measurement of Electrical Properties

Study on Space Morphology of Molecular Structure of Tungsten Trioxide Compound Film Surface by AFM

Experimental study on nanometer moire method

Microwave Atomic Force Microscopy: Quantitative Measurement and Characterization of Electrical Properties on the Nanometer Scale

Study on Surface Structure and Composition of the Smaller Size Organic Nanotube and Its Supermolecule Thin Films Using AFM/force Curve Method

Characterization and Measurement of Nanobiological Structure with Atomic Force Microscopy

In-plane deformation measurement using the atomic force microscope moiré method

Probing Nanometer Structures with Atomic Force Microscopy

Research Progress of AFM Functionalized Imaging and Molecular Recognition