Magnetron Sputtering Sn-Ag-O Thin Film Anodes For Rechargeable Lithium Ion Batteries

Yang Li,Jiangping Tu,Deqin Shi,Yongfeng Yuan,Huiming Wu,Xiaohua Huang
DOI: https://doi.org/10.1109/NEMS.2006.334630
2006-01-01
Abstract:Sn-Ag-O thin films were deposited by DC magnetron co-sputtering in a gas mixture of Ar and O-2. The microstructure and morphology of the thin films were characterized by X-ray diffraction (XRD) and field emission scanning electron microscopy (FE-SEM). The Sn2.3AgO0.9 and Sn1.3AgO0.6 film films deposited at room temperature showed a mixture of crystalline and glassy structure in XRD patterns, whereas the Sn0.1AgO0.1 films only presented metallic silver diffraction peaks. Electrochemical performances of the thin film anodes were investigated by means of charge-discharge tests in half-cells. The volumetric specific capacity increased and the cycling stability decreased upon increasing the relative content of Sn in the films. For the Sn2.3AgO0.9 thin film, the cyclability was evidently enhanced after annealing at 200 degrees C.
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