Coupled electrostatic-structural analysis for a 3-D micro-comb structure

Yi Zhu,Dan Guo

2006-01-01

Abstract:The character of electrostatic-structural coupled field for a 3-D comb structure was discussed, in order to explore the electrostatic-structural coupled field effect which can be very complicated in the motion of micro comb structure, driven by electrostatic force. The effect of the coupling in three directions to the driving forces of the comb was simulated and analyzed using finite element method (FEM). Results show that the coupling is more effective with the voltage increase, especially in x direction. Designers of comb structure should consider the coupling for different situations.