Abstract:The laser exposure of multi‐photon lithography allows an adjustable refractive index out of single material while preserving laser 3D nanolithography's flexibility in geometry and high resolution. The refractive index for the 450–1600 nm spectral range of the micro‐optics out of SZ2080 hybrid polymer is studied by applying ray and wave optics approaches followed by optical resolution analysis. 4D printing of hybrid organic–inorganic polymer SZ2080 micro‐lenses with controlled numerical aperture is achievable by adjusting the laser exposure in direct write 3D nanolithography. Laser exposure defines voxel's dimensions as essential building blocks in direct write 3D nanolithography. However, the exposure conditions not only influence the size of the produced features but also their optical properties. This empowers the realization of an adjustable refractive index out of single material by varying the writing strategy while preserving laser 3D nanolithography's flexibility in geometry and high resolution. Here, the refractive index for the 450–1600 nm spectral range of the micro‐optics out of SZ2080 hybrid polymer is systematically studied by applying ray and wave optics approaches followed by optical resolution analysis. It reveals the exact value of the laser‐printed components instead of the determination assessed by other techniques measuring thin films or bulky volumes of the investigated substance. The studied micro‐lenses are of below 100 μm in dimensions and a clear distinction in their performance on low and high exposure doses is found by analyzing it in all different approaches and validating using different lithography setups. Findings reveal the complexity of the refractive index of the 3D micro‐optics which is influenced by the material density and morphology. A route for freedom in 3D printing shape and refractive index can be realized by the technological optimization of delicate exposure control in ultrafast laser nanolithography.

Optimal Exposure Distances for 3-D Optical Circuits Induced by Laser Micromachining in LiNbO 3 Crystals

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Compact 1 X 3 Waveguide Beam Splitters with Variable Splitting Ratios in LiNbO3 Crystal Fabricated by Femtosecond Laser Direct Writing

Flat Optical Lens by Use of 90-Degree Volume Holographic Grating Recording Geometry and Nonvolatile Thermal Fixing in LiNbO3:Fe Crystal

Three-dimensional Numerical Simulation on the Directly Written Waveguide Formation with 320 Nm UV Laser in Lithium Niobate

New channel guiding structures via femtosecond laser direct writing z-cut LiNbO 3 crystals

Fabrication of Polarization-Independent Waveguides Deeply Buried in Lithium Niobate Crystal Using Aberration-Corrected Femtosecond Laser Direct Writing

Optimisation of microstructured waveguides in z-cut LiNbO3 crystals

Fabrication of polarization-independent waveguides deeply buried in crystal using aberration-corrected femtosecond laser direct writing

3D polarization-dependent waveguide arrays in LiNbO3 crystal produced by femtosecond laser writing

3D Laser Writing of Low‐Loss Cross‐Section‐Variable Type‐I Optical Waveguide Passive/Active Integrated Devices in Single Crystals

Reconfigurable directional coupler in lithium niobate crystal fabricated by three-dimensional femtosecond laser focal field engineering

Precise mode control of laser-written waveguides for broadband, low-dispersion 3D integrated optics

Optimization Design and Fabrication of Photonic Crystal Waveguides Based on Soi Using 248-Nm Deep-Uv Lithography

Aberration Precompensation Laser Direct Writing Within Lithium Niobate Crystals(Invited)

Single‐Step 3D Printing of Micro‐Optics with Adjustable Refractive Index by Ultrafast Laser Nanolithography

Investigation of etching two-dimensional microhole lattice array on lithium niobate with focused ion beam for fabricating photonic crystals

High Speed Precise Refractive Index Modification for Photonic Chips through Phase Aberrated Pulsed Lasers

Fabrication of Waveguide with Ferroelectric-Domain Structure on Electro-Optical Crystal Slice

Arbitrary fabrication of complex lithium niobate three-dimensional microstructures for second harmonic generation enhancement

Nonlinear waveguides by femtosecond laser writing of lithium triborate crystals