Abstract:A new approach has been developed to fabricate a lowvoltage integrated electrophoresis chip based on silicon-on-insulator micro electron mechanical systems (SOI-MEMS). Arrayed-electrodes are embedded along the microchannel sidewall in the designed microchip. Because voltage should be applied effectively to arrayed-electrodes to serve as the driving force for the on-microchip electrophoresis, electrical isolation between arrayed-electrodes is essential for a practicable lowvoltage integrated electrophoresis chip. Fabrication of arrayedelectrodes becomes the critical technique that governs the performance of the low-voltage integrated electrophoresis chip. Combined with the SOI substrate, full dielectric isolation is proposed to obtain highperformance integrated three-dimensional (3-D) sidewall arrayedelectrodes. The fabrication processes mainly consist of SOI wafer fabrication, narrow trench etching, polysilicon refilling and planarization, boron diffusion to form arrayed-electrodes, elicitation and protection of arrayed-electrodes, dry etching to obtain reservoirs and microchannels, etc. In order to obtain high-quality electrical isolation between arrayedelectrodes, process experiments were conducted to obtain optimized operational parameters. Poly (dimethylsiloxane) (PDMS) was selected as a cover to achieve a hybrid electrophoresis chip. The validity of the hybrid electrophoresis chip was tested by amino acid separation. Results showed high performance of the fabricated low-voltage integrated electrophoresis chip based on SOI-MEMS. c 2007 Society of Photo-Optical Instrumentation Engineers.

Electric Field Simulation of Separation Mode on Low Voltage Electrophoresis Chip

Fluidic Field Simulation of Separation Mode on Low Voltage Electrophoresis Chip by CoventorWare

Design And Fabrication Of Low Voltage Integrated Electrophoresis Chip

Simulation of the electro-osmosis in the micro-channel on the electrophoresis chip based on the theory of low Reynolds Number

Simulation and experiment of separation efficiency affected by Joule Heat on electrophoresis chip

Numerical Study of A Dielectrophoresis Separation Device at Multiple Frequencies

Study on the influence of cross-sectional area and zeta potential on separation for hybrid-chip-based capillary electrophoresis using 3-D simulations.

A Full-Scale Computational Study on the Electrodynamics of a Rigid Particle in an Optically Induced Dielectrophoresis Chip

Numerical Simulation Of Electroosmotic Flow In Microfluidic Chip

Fabrication and Testing Investigation of Low-Voltage Integrated Electrophoresis Chip Based on Silicon-on-insulator-mems

Experimental and Simulation Research of the Separation of Amino Acids on Micro Free-Flow Electrophoresis Chip with Voltage Applied in Two-Dimensions

SEPARATION EFFICIENCY OF MICROPARTICLE IN THE DIVERGENT ELECTROKINETIC MICROCHANNEL FLOW

Optimized Design about Microchannel Shape of Sample Injection on Microchip Electrophoresis

Progress on Computer Assisted Electrophoresis Microchip Design

Studies on Dielectrophoretic Separation Using Biochips with Different Electrode Shapes

Design Of Driving Circuit For Integrated Low-Voltage Electrophoresis Chip

Direct numerical simulation of particle separation by direct current dielectrophoresis

Performance Testing And Analysis Of Electrophoresis Process Driven By Low Voltage On The Soi Microchip

Design and Experiment Research of Integrated Capillary Electrophoresis Chip

Design Of Separation Length And Electric Field Strength For High-Speed Dna Electrophoresis

Improvement of Microchannel Geometry Subject to Lateral Dielectrophoresis Using Numerical Simulations