Abstract:Carbon nanotubes (CNT) have been developed in recent decades for nanodevices such as nanoradios, nanogenerators, carbon nanotube field effect transistors (CNTFETs) and so on, indicating that the application of CNTs for nanoscale electronics may play a key role in the development of nanotechnology. Nanorobotics manipulation systems are a promising method for nanodevice construction and assembly. For the purpose of constructing three-dimensional CNTFETs, a nanorobotics manipulation system with 16 DOFs was developed for nanomanipulation of nanometer-scale objects inside the specimen chamber of a scanning electron microscope (SEM). Nanorobotics manipulators are assembled into four units with four DOFs (X-Y-Z-θ) individually. The rotational one is actuated by a picomotor. That means a manipulator has four DOFs including three linear motions in the X, Y, Z directions and a 360-degree rotational one (X-Y-Z-θ stage, θ is along the direction rotating with X or Y axis). Manipulators are actuated by picomotors with better than 30 nm linear resolution and <1 micro-rad rotary resolution. Four vertically installed AFM cantilevers (the axis of the cantilever tip is vertical to the axis of electronic beam of SEM) served as the end-effectors to facilitate the real-time observation of the operations. A series of kinematic derivations of these four manipulators based on the Denavit-Hartenberg (D-H) notation were established. The common working space of the end-effectors is 2.78 mm by 4.39 mm by 6 mm. The manipulation strategy and vision feedback control for multi-manipulators operating inside the SEM chamber were been discussed. Finally, application of the designed nanorobotics manipulation system by successfully testing of the pickup-and-place manipulation of an individual CNT onto four probes was described. The experimental results have shown that carbon nanotubes can be successfully picked up with this nanorobotics manipulation system.

A Study On The Assembly Method Of Single Carbon Nanotube Based On Nanomanipulation Robot

A Deterministic Process for Fabrication and Assembly of Single Carbon Nanotube Based Devices

Force Analysis Of Top-Down Forming Cnt Electrical Connection Using Nanomanipulation Robot

Precise Assembly and Electrical Contact of MWCNT Based on AC Dielectrophoresis and Robotic Nanomanipulation Technology

A Method Study on Assembly of Single-Wall Carbon Nanotube Field Effect Transistor Using Dielectrophoresis

Study on the Nanomanipulation of Carbon Nanotubes Using an Atomic Force Microscope

Study on the fabrication methods of carbon nanotube probe

Manipulation and Cutting of Carbon Nanotubes

Nanomanipulation of Carbon Nanotubes with the Vector Scanning Mode of Atomic Force Microscope

Assembly of a CNT-FET Based on Nanorobotic Manipulation System Inside a SEM

Assembly and Fabrication of Single-Wall Carbon Nanotube Field Effect Transistor Using Dielectrophoresis Method

Nanorobotic manipulation of carbon nanotubes inside a transimission electron microscope

Manufacturing Structures in Nanometer Scale by Nanomanipulation

Nanomanipulation of a single carbon nanotube for the fabrication of a field-effect transistor

Mechatronic Development and Vision Feedback Control of a Nanorobotics Manipulation System inside SEM for Nanodevice Assembly

A Nanoscale Technique For The Large-Scale Assembly Of Carbon Nanotubes Device

Facile manipulation of individual carbon nanotubes assisted by inorganic nanoparticles.

Study on the large-scale assembly and fabrication method for SWCNTs nano device

A Vision-Based Automated Manipulation System for the Pick-Up of Carbon Nanotubes

Automated Pick-Up Of Carbon Nanotubes Inside A Scanning Electron Microscope

Micro/Nanomanipulation of Carbon Nanotubes