Research of MEMS Dynamic Testing Based on Comb Silicon Micro-Resonator

ZHENG Li-na,XUE Chen-yang,ZHANG Wen-dong,XIONG Ji-jun,ZHANG Bin-zhen,KONG Fan-hua
DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.05.058
2006-01-01
Abstract:Based on laser Doppler technique, multistage oscillation frequency of the comb silicon micro-resonator are obtained, the resonance frequency and the amplitude are tested combining with stroboscope interferometric technology, and the dynamic stress value of the resonator is deduced according to the test result. The test results and the deduced stress value are matched with the ANSYS simulation results.
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