Abstract:The reliability and stability of MEMS electrostatic comb resonators have become bottlenecks in practical applications. However, there are few studies that comprehensively consider the nonlinear dynamic behavior characteristics of MEMS systems and devices in a coupled field so that the related simulation accuracy is low and cannot meet the needs of design applications. In this paper, to avoid the computational complexity and the uncertainty of the results of three-field direct coupling and take into the damping nonlinearity caused by coupled fields, a novel electrostatic-fluid-structure three-field indirect coupling method is proposed. Taking an actual microcomb resonant electric field sensor as an example, an electrostatic-fluid-structure multiphysics coupling 3D finite element simulation model is established. After considering the influence of nonlinear damping concerning the large displacement of the structure and the microscale effect, multifield coupling dynamics research is carried out using COMSOL software. The multiorder eigenmodes, resonant frequency, vibration amplitude, and the distribution of fluid load of the microresonator are calculated and analyzed. The simulated data of resonance frequency and displacement amplitude are compared with the measured data. The results show that the fluid load distribution of the microelectrostatic comb resonator along the thickness direction is high in the middle and low on both sides. The viscous damping of the sensor under atmospheric pressure is mainly composed of the incompressible flow damping of the comb teeth, which is an order of magnitude larger than those of other parts. Compared with the measured data, it can be concluded that the amplitude and resonance frequency of the microresonator considering the nonlinear damping force and residual thermal stress are close to the experimental values (amplitude error: 15.47%, resonance frequency error: 12.48%). This article provides a reference for studies on the dynamic characteristics of electrostatically driven MEMS devices.

Design and Simulation of MEMS Silicon Micro-Cantilever Resonant Sensor

Simulation and Design of Piezoelectric Microcantilever Chemical Sensors

Discussion on the optical-coupling in silicon optical-type micromechanical sensors

Fabrication and Characterization of Sio2 Microcantilever for High Sensitive Moisture Sensor

Simulation of SiO2-based Piezoresistive Microcantilevers

Design of a Hybrid Micro/Nano Cantilever-based Resonant Sensor and its Fabrication Method

Design of Piezoresistive Micro-Cantilever with Stress Concentration Regions

Design, Analysis, and System-Level Simulation of A Micromachined Resonant Charge Sensor with Microleverage Mechanisms

Principle and Simulation of Microresonating Cantilever Sensor Based on Third Harmonic Detection

Design of High-Sensitivity Cantilever and Its Monolithic Integration with CMOS Circuits

Design and Simulation of a Silicon Beam Resonant Accelerometer

A Smart Resonating Micro-Cantilever in MEMS Gas Sensor: Improved Design

Design and Simulation of Quartz Resonant Accelerometer

Direct Bonding SOI Wafer Based MEMS Cantilever Resonator for Trace Gas Sensor Applicaiton

Microelectromechanical System Resonant Devices: A Guide for Design, Modeling and Testing

A MEMS Resonant Sensor to Measure Fluid Density and Viscosity under Flexural and Torsional Vibrating Modes

Miniaturized Multi-Cantilever MEMS Resonators with Low Motional Impedance

Design, Fabrication, and Dynamic Analysis of a MEMS Ring Resonator Supported by Twin Circular Curve Beams

Design and Optimization of Laminated Piezoresistive Microcantilever Sensors

Design and Manufacture of a High Precision MEMS Flexible Force Sensor

Electrostatic-Fluid-Structure 3D Numerical Simulation of a MEMS Electrostatic Comb Resonator