Experimental Analysis and Simulation of Microgripper with Flexure Hinge

Xu WANG,Xue-jin SHEN,Yong-yu ZHANG
DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.05.065
2006-01-01
Abstract:The Micromanipulator, which is directly contact with the applied object in Micro Electro-Mechanical System, should have high setting accuracy, high stability and high response speed and be easy to control. The flexure hinge is widely used in the micromanipulator due to its special natures. This paper is studying a kind of electrothermal-actuating microgripper with flexure hinge. The mechanical behavior is studied by the way of doing experiment and FE Analysis. The result indicates that the deflection of the microgripper is approximately proportional with the change of voltage. And the different characters of the microgripper with different configuration of flexure hinge are simulated using ANSYS.
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