Abstract:Micro and nano positioning stages are critically important to both the mechanical and electronic industries. Gripping micro objects are required for a wide range of important applications such as the assembly of micro-parts to obtain miniature systems or component assembly in electronics packages. An effective mechanical micro and nano manipulator should possess the ability to grasp objects of different shapes steadily with high positioning accuracy. A microgripper compliant mechanism is one of the key elements in micro-robotics and micro-assembly technologies for handling micro-objects without damage. Compliant mechanisms can play an important role in the design of micro- devices for micro-electro-mechanical systems (MEMS) applications. Compliant mechanisms are flexible structures, which can generate the desired motions by undergoing elastic deformation instead of through rigid linkage/joints as in rigid body mechanisms. The topology optimization methods search for an ideal material distribution of a structure. In this paper, topology optimization method is applied for designing a threedimension compliant microgripper mechanism. The optimal topology configuration of the compliant microgripper mechanism is demonstrated. This compliant mechanism can be used to handle a wide range of micro and nano objects up to 400μm. © 2009 IEEE.

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