Design And Optimization Of Flexure Hinges

ShiXi Yang,Heng Pan,GongBiao Yan
2002-01-01
Abstract:Flexure hinges have been studied since 1960s. Recent intensive interest in MEMS makes flexure hinges our research focus again. As, an important part in micro-positioner, flexure hinges influence the accuracy, stability and durability of the entire system. This paper focuses on shape optimization of flexure hinges in an effort to obtain optimized accuracy and stress. We modeled several groups of flexure hinges, including right circular hinges, elliptical hinges, corner-filleted hinges and right angle hinges, with same stiffness by ANSYS, their accuracy and maximum stress were then compared, and results were presented and discussed, a conclusion was finally drawn.
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