Abstract:Inductively coupled plasma generator is one of the core components of the near-space high-speed target plasma electromagnetic scientific experimental research device, which is often used to simulate high enthalpy and high speed plasma sheath environment. In order to study the discharge characteristics of inductively coupled plasma generator under high power, radio frequency and medium pressure, the numerical simulation and experiment are combined to study its internal heat transfer and flow characteristics in this paper. Based on the local thermodynamic equilibrium conditions, the numerical simulation of large-scale radio frequency and medium pressure inductively coupled plasma with a power of 100–400 kW is carried out through the multi-field coupling of flow, electromagnetic and temperature field, and verified by light intensity and spectrum experiment. The results show that the electromagnetic field distribution in the high-power thermal balance inductively coupled plasma generator is similar to that of the small- and medium-sized power plasma generator. The discharge energy dissipation occurs mainly in the area where the induction coil is located. The temperature of the inner wall of the quartz tube is higher at the coil location than in other areas, and the plasma has a ring-shaped high-temperature structure. The outer wall of the quartz tube is set to be the boundary condition of heat flux for simulating the temperature change of the quartz tube under cold blowing. This setting is in coincidence with factual situations. The wall temperature of the quartz tube at the entrance and at the induction coil section are found to be relatively high. When the large-size inductively coupled plasma generator works, an obvious return vortex is generated at the entrance due to the temperature difference and the electromagnetic pumping effect, and the exit velocity increases slightly with the increase of power. At the same time, the discharge experiment under the corresponding conditions shows that there is found a ring structure with bright edges and dark centers in the axial image of the argon discharge. Moreover, the emission spectrum of argon plasma is measured through the spectrum diagnosis system and the spatial distribution of the generator electron temperature is obtained. The light intensity of the discharge image and the electron temperature measured by the spectrum are found to be in comparative coincidence with the COMSOL simulation temperature result, demonstrating the validity of the numerical simulation results under thermodynamic equilibrium conditions. The numerical simulation results in this paper are also applicable to the optimization design and temperature resistance evaluation of the inductively coupled plasma generator.

One-dimension Hydrodynamics Simulation of an Inductively Coupled Plasma

Two-Dimensional Simulation of Inductively Coupled Plasma Based on Comsol and Comparison with Experimental Data

Two-Dimensional Discharge Simulation of Inductively Coupled Plasma Etcher

Kinetic simulations of low-pressure inductively coupled plasma: an implicit electromagnetic PIC/MCC model with the ADI-FDTD method

Study of transport process and discharge structure of inductively coupled electronegative plasmas via fluid model and analytic theory collaboration

Simulation study of an inductively coupled plasma discharge with different copper coil designs and gas compositions

Two-dimensional Model and Experimental Comparison of an Inductively Coupled Plasma

Two-Dimensional Spatial Distribution And Production Mechanism Of H- Ions In Cylindrical Inductively Coupled H-2 Discharges

The Effect of Discharge Conditions of ICP Etching Reactor on Plasma Parameters

Numerical Simulation and Experimental Study of High-Power Thermal Equilibrium Inductively Coupled Plasma

Three-Dimensional Numerical Simulation of Inductively Coupled Plasma Generator

Self-Consistent Kinetic Modeling of Electron Distribution Function in a Low-Pressure Inductively Coupled Plasma

Parametric Study on Suspension Behavior in an Inductively Coupled Plasma

Self-Consistent Kinetic Modeling of Low-Pressure Inductively Coupled Radio-Frequency Discharges

Simulation of Low-Pressure Inductively Coupled Plasma with Displacement Potential and Gas Flow

Three-Dimensional Discharge Simulation of Inductively Coupled Plasma Etcher

Three-Dimensional Discharge Simulation of Inductively Coupled Plasma (icp) Etching Reactor

Fluid Model of Inductively Coupled Plasma Etcher Based on Comsol

Calculations of flow field and heat exchange properties in high-power high-enthalpy inductively coupled plasma generator

Fluid simulation of the plasma uniformity in pulsed dual frequency inductively coupled plasma

Electromagnetic Field Distribution Calculation in Solenoidal Inductively Coupled Plasma Using Finite Difference Method