Abstract:A fully self-consistent second order accuracy model for coupling a generalized external circuit and a one-dimensional bounded electrode-driven plasma was proposed in this paper. The plasma was embedded in the circuit as a non-linear element with a potential difference. Based on Kirchhoff's voltage law and the definition of current, the problem of solving the generalized external circuit was transformed into an initial value problem of a set of first-order ordinary differential equations which can be discretized numerically by the second-order backward differential formula. The charge conservation equation at the electrode plate was coupled to the above equation, and the voltage, current, and surface charge density at the next moment were solved by a differential equation solver. Dirichlet boundary conditions of Poisson's equation were obtained through the surface charge density σ0 of the generalized external circuit equation and the plasma density ρ of the Particle-in-Cell (PIC) model. The spatial distribution of plasma potential was solved by using the second-order central difference scheme. The obtained potential at the electrode plate can be used as the Robin boundary condition of the system of generalized external circuit equations. In this model, the loose coupling between the generalized external circuit and plasma was realized by the boundary condition, and the system was fully self-consistent based on the charge conservation law and energy conservation law. We simulated the capacitively coupled plasmas (CCP) under different external circuits as the example and verified the performance of the model. This model can be used to study the influence of different external circuit structures and parameters on plasma discharge, and can be used for any plasma sources driven by electrodes, like CCP, some vacuum electronic devices, and Z-Pinches.

Electromagnetic Field Distribution Calculation in Solenoidal Inductively Coupled Plasma Using Finite Difference Method

The Penetrated and Scattered Field Distributions in the Presence of a Non-Uniform Cold Magnetised Plasma Column Surrounded By Multiple Strips: Tm Wave Incidence

Helmholtz Decomposition Based On Integral Equation Method For Electromagnetic Analysis

Self-Consistent Kinetic Modeling of Low-Pressure Inductively Coupled Radio-Frequency Discharges

Two-Dimensional Simulation of Inductively Coupled Plasma Based on Comsol and Comparison with Experimental Data

Two-dimensional Model and Experimental Comparison of an Inductively Coupled Plasma

A 2-D Axisymmetric Magneto-Hydrodynamic Model of a DC Arc Plasma Torch and Its Solution Methodology

Analysis of the Axial Electric Field in A Plasma-Loaded-Helix Travelling Wave Tube

Self-Consistent Kinetic Modeling of Electron Distribution Function in a Low-Pressure Inductively Coupled Plasma

A Method Based on Measured Boundary Conditions for Reconstructing the Magnetic Field Distribution of an Electromagnetic Mechatronic System

Wave modelling in a cylindrical non-uniform helicon discharge

Electromagnetic Analysis for Interior Permanent-Magnet Machine Using Hybrid Subdomain Model

Efficient Calculation of Near-Field from PDN Using Equivalent Magnetic Current Modal

Distribution Of The Axial Electric Field In A Helix Traveling Wave Tube Filled With Plasma

Kinetic simulations of low-pressure inductively coupled plasma: an implicit electromagnetic PIC/MCC model with the ADI-FDTD method

Fluid Model of Inductively Coupled Plasma Etcher Based on Comsol

A hybrid model for low pressure inductively coupled plasmas combining a fluid model for electrons with a plasma-potential-dependent energy distribution and a fluid-Monte Carlo model for ions

A generalized external circuit model for electrostatic particle-in-cell simulations

Electrical Description of an Inductively Coupled Plasma Processing Reactor with Discharge Parameters Calculated from a Global Model

Three-Dimensional Discharge Simulation of Inductively Coupled Plasma (icp) Etching Reactor

A Calculation Method of Electromagnetic Wave Reflection in Plasma Sheath Environment