Abstract:Photonic integrated circuits based on Lithium Niobate have demonstrated the vast capabilities afforded by material with a high Pockels coefficient, allowing linear and high-speed modulators operating at CMOS voltage levels for applications ranging from data-center communications and photonic accelerators for AI. However despite major progress, the industrial adoption of this technology is compounded by the high cost per wafer. Here we overcome this challenge and demonstrate a photonic platform that satisfies the dichotomy of allowing scalable manufacturing at low cost, while at the same time exhibiting equal, and superior properties to those of Lithium Niobate. We demonstrate that it is possible to manufacture low loss photonic integrated circuits using Lithium Tantalate, a material that is already commercially adopted for acoustic filters in 5G and 6G. We show that LiTaO3 posses equally attractive optical properties and can be etched with high precision and negligible residues using DUV lithography, diamond like carbon (DLC) as a hard mask and alkaline wet etching. Using this approach we demonstrate microresonators with an intrinsic cavity linewidth of 26.8 MHz, corresponding to a linear loss of 5.6 dB/m and demonstrate a Mach Zehnder modulator with Vpi L = 4.2 V cm half-wave voltage length product. In comparison to Lithium Niobate, the photonic integrated circuits based on LiTaO3 exhibit a much lower birefringence, allowing high-density circuits and broadband operation over all telecommunication bands (O to L band), exhibit higher photorefractive damage threshold, and lower microwave loss tangent. Moreover, we show that the platform supports generation of soliton microcombs in X-Cut LiTaO3 racetrack microresonator with electronically detectable repetition rate, i.e. 30.1 GHz.

Electrical-Poling Technology of Lithium Tantalate for Quasi-Velocity-Matching Phase Modulator

Room Temperature Electrical Poling Technology of Stoichiometric Lithium Tantalate for Parametric Oscillator

Design of Quasi-Velocity Matched Litao3 Phase Modulator

Fabrication of Homogenous Periodically Poled Stoichiometric Lithium Tantalate Wafer

Study of Polymer-Based Electrooptic Modulators Using Contact PoliNg

Experimental Realization of Broadband Parametric Generation in a Quasi-Periodically Poled LiTaO_3

Periodic poling of thin-film lithium tantalate by applying a high-voltage electric field

Study of LiTa03 Crystals Grown with a Modulated Structure I. Second Harmonic Generation in LiTa03 Crystals with Periodic Laminar Ferroelectric Domains

Etching Study of Poled Lithium Tantalate Crystal Using Wet Etching Technique with Ultrasonic Assistance

Fabrication of a lithium tantalate temperature-stabilized optical modulator

Lithium tantalate electro-optical photonic integrated circuits for high volume manufacturing

Experimental Study of Electric-Field Poling in LiNbO_3 Crystal by Femtosecond Laser Carving

Second Harmonic Generation in LiTaO 3 Crystals with Modulated Structure

Efficient Second-Harmonic Generation in Thin-Film Lithium Tantalate Through Modal Phase-Matching

Ultrabroadband thin-film lithium tantalate modulator for high-speed communications

Polarization Coupling of Light and Optoelectronics Devices Based on Periodically Poled Lithium Niobate

Optical Modulation of MoTe2/Ferroelectric Heterostructure via Interface Doping.

Optical Modulation of MoTe2/Ferroelectric Heterostructure Via Interface Doping

Surface-near domain engineering in multi-domain x-cut lithium niobate tantalate mixed crystals

LiTaO3 Crystal Periodically Poled by Applying an External Pulsed Field

Research on Defects and Domain Characteristics of MgO-doped Near-Stoichiometric Lithium Tantalate in Room-Temperature Polarization Process