Transport Efficiency of Vacuum Arc Plasma in a Curved Magnetic Filter

YW Hu,LH Li,M Xu,YM Liu,X Cai,IG Brown,PK Chu

DOI: https://doi.org/10.1063/1.1848492

2005-01-01

Abstract:We describe two methods for increasing the transmission efficiency of vacuum arc plasma through curved magnetic filters. In the first method the substrate is connected to the anode or biased to a negative voltage. In the second method a metal grid is placed between the substrate and the exit of the magnetic filter, and biased to a positive voltage whereas the substrate is biased negatively. The ion saturation current and electron saturation current of the plasma between the filter exit and the substrate were measured using a current collector plate and a Langmuir probe, respectively, and the ion density estimated. For the experimental conditions of the work described here, the measured ion flux (ion saturation current) near the duct exit was increased by up to about 80% (from 140 to 250 mA), and the measured ion density was increased by up to about 40% (from 3.7×1011 to 5.2×1011cm−3). These results can be explained by the ambipolar influence of enhanced electron flow on the accompanying plasma ion component, leading also to enhanced ion flow.