A New Self-assembly Metal CMG Discriminator by Multi-exposure LiGA Like Process and Sacrificial Layer Process

ZHANG Wei-ping,CHEN Wen-yuan,ZHAO Xiao-lin,DING Gui-fu,LI Sheng-yong,张卫平,陈文元,赵小林,丁桂甫,李胜勇
2005-01-01
Abstract:The counter-meshing gears (CMG) discriminator is a mechanically coded lock, which is used to prevent the occurrence of High Consequence Events. This paper advanced a new kind of self-assembly metal CMG discriminator based on multi-exposure LiGA like process and sacrificial layer process. The new CMG discriminator has the following characters except low cost: 1) it has only discrimination teeth sections; 2) the thickness of each gear layer exceeds one hundred micrometers; 3) it is axially driven by a separate electronic magnetic micromotor directly; 4) its CMG is made of metal and is batch fabricated in the assembled state; 5) it is prevented from rotating in the opposite direction by pawl/ratchet wheel mechanism; 6) it has simpler structure. This device has better strength and reliability in abnormal environment compared to the existing surface micro machining (SMM) discriminator.
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