The properties of antimony-doped tin oxide thin films by the sol-gel approach

L Zhao,DL Zhang,G Du,JM Xu,DX Zhou
DOI: https://doi.org/10.4028/www.scientific.net/KEM.280-283.831
2005-01-01
Key Engineering Materials
Abstract:Antimony-doped tin oxide thin films have a range of technical applications LS conductive coatings, and sol-gel processing seems to offer some advantages over other coating techniques. In this study, the sol was prepared by sol-gel approach from SnO2 H2O and SbCl3 in alcohol. It was found that the heat-treatment temperature and doping level have strong influences on the microstructure and composition of Sb: SnO2 films. The SnO2 crystals exist mainly as tetragonal rutile structure. The optimum heat-treatment temperature is about 450 similar to 500degreesC, and the film is composed with nanocrystals and nano-pores. Microstructure and the electrical behaviors of Sb-doped SnO2 thin films derived by sol-gel process were investigated.
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