Preparation and microstructure of thin TiO2 films containing Ca and P using micro-arc oxidation

Qing Dong,Chuanzhong Chen,Diangang Wang,J. I. Qianmao
DOI: https://doi.org/10.1142/S0218625X05007426
2012-01-01
Surface Review and Letters
Abstract:Micro-arc oxidation (MAO) is a novel technique for producing oxide films on metals like Al, Mg, Ti and Zr. A ceramic-like film containing Ca and P was deposited on Ti-6Al-4V substrate by MAO in an electrolytic solution using a pulsed power supply. XRD indicated that the film was a mixture of anatase, rutile and VO. SEM showed that the surface of the film was microporous with 1-2 mu m pores. EDS gave the element distributions of the cross-section. The result indicated that elements like Ca and P could be incorporated into the film during MAO process. The microhardness test showed that the film had an average hardness of 540 HV0.025.
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