Abstract:In this paper, theoretical work on the transmitted-aperture (TA) type super-RENS was introduced. Firstly, the forming of transmitted-aperture in the mask layer was studied based on laser-induced thermal model with Gauss assumption. A numerical simulation was carried out by FEMLAB. The simulation results showed that transmitted aperture would not be formed until the exposure power exceeded a threshold within a certain pulse time and vice versa. Secondly, a calculation model of electromagnetic field of TA type super-RENS disk was presented based on the three-dimensional finite-difference time-domain method (3D-FDTD) together with a vector method of Gaussian beam. Lorenz dispersive model was employed for mask layer and reflective layer. The distributions of electric field for TA type super-RENS were theoretically analyzed. Lastly, the static writing experiment for TA type Super-RENS was carried out with different power and pulse time, as well as for conventional CD-R/W. The experiment results well satisfied the simulation.

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